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BX-300 Wafer Handling (PDF)
BX-300 (PDF)
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Autocalibration® Technology
Autocalibration simplifies, speeds, and improves robot calibration. It is typically 10X more repeatable than manual teaching, and takes only minutes.





In one critical Tier 1 evaluation, Autocalibration technology demonstrated repeatability of less than 50 microns standard deviation for each axis of motion — that’s about the width of a human hair


 
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