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Front-End Wafer Handling Systems and FOUP Buffers
Berkeley's
innovative solutions design capabilities, and flexible automation
products, have been successfully applied to complex semiconductor
wafer- and wafer carrier-handling challenges. Several 300
mm solutions have been described in trade press articles.
A 13 FOUP
(Front-Opening Unified Pod) buffer and integrated high-throughput
300 mm wet bench front-end employing Autocalibration®
technology to speed installation and repair.
"Space
Constraints Yield Faster, Simple Handling For 300 mm Wafers"
- Design News, June 5, 2000 * (PDF - 2049k)
Advanced
control architecture boosts throughput of four robot 300 mm
front-end.
"Robots
Perform In Parallel" - Design News, April 23, 2001
* (PDF - 2187k)
Two case
studies detail considerations and tradeoffs in controls design
for semiconductor wafer-handling systems.
"Using
An Integrated Controller To Manage Wafer-Handling Systems"
- MICRO, September 2001 * (PDF - 260k)
*Reprinted
by permission of copyright holders Cahners Business Information,
Cahners Business Information, and Canon Communications, respectively.
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