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BERKELEY TO SHOW BREAKTHROUGH WAFER-HANDLING TECHNOLOGIES DURING SEMICON WEST, SF, JULY 14-16
Technologies Provide New Choices for Reliability, Performance
RICHMOND, Calif., July 10, 2003 - During SEMICON West, Berkeley Process Control will demonstrate breakthroughs that give semiconductor tool OEMs powerful new choices for reliability and performance improvement in wafer-handling systems.
Berkeley will demonstrate how it is now possible for OEMs to choose new robots, and to incorporate them quickly-with no changes to their tool architecture or tool host software. "Tool OEMs view wafer handling as a critical, but low level, function that causes way too much pain," said Berkeley President Paul Sagues. "Key OEMs are demanding the marriage of best-of-class controls and robot technologies to provide critically needed improvements in wafer-handling reliability. We are effectively delivering on this demand." He noted that Berkeley is currently proving these capabilities in four Tier 1 OEM design wins.
Berkeley will demonstrate uniquely capable diagnostics to speed tool setup, fault isolation, and repair. Sophisticated subsystem diagnostics reduce guesswork in tool setup and fault finding. Qualitative performance assessment and statistical analysis capabilities help to accurately identify robot performance problems. Unnecessary and costly robot replacement can be avoided.
Berkeley will demonstrate its patented Autocalibration® technology. Autocalibration technology improves equipment productivity by automating critical robot calibration processes that are conventionally performed by technicians using time-consuming and subjective manual methods. Calibration that previously required many hours is reduced to just minutes. Subjectivity is eliminated, resulting in highly repeatable calibration and improved tool reliability.
The wafer-handling technologies that Berkeley will demonstrate during SEMICON West offer a practical way for semiconductor tool OEMs to realize substantial, and critically needed, improvement in wafer-handling reliability and performance.
About Berkeley Process Control: Berkeley Process Control, Inc., Richmond California, a privately held company founded in 1981, is a leading provider of innovative automation solutions and flexible automation products. Berkeley solutions have enhanced productivity in applications that include semiconductor fabrication, optical fiber manufacturing, automated welding, aircraft manufacturing, packaging and converting, and general automation. Berkeley capabilities include multi-disciplinary engineering expertise to deliver motion, process and turnkey machine solutions, as well as the design of flexible machine-and-motion control products.
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BX-300 Wafer Handling (PDF)
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