The BXpa wafer
pre-aligner is the industry leader for speed and accuracy. The BXpa
can achieve wafer orientations within a +/-.04 degree of accuracy
and under one second, utilizing CCD array technology. It is available
for use with 200 or 300 mm wafer sizes and comes with vacuum chuck
as standard. The BXpa features plug-and-play integration with the
BX Controller and is furnished with a fully connectorized cable
set. In just a few minutes the BXpa can be installed, configured,
and operational.
CCD Array
Technology
Plug-and-Play
with BX controller - no external power source needed
Direct Control
via BX controller - resulting in higher performance than serially
controlled aligners
Small, compact
form factor for both 200mm and 300mm