|
 |
|
Semiconductor Components
Berkeley
Process Control offers system-, subsystem- and component-level products
to semiconductor industry toolmakers. Robust designs combined with
advanced capabilities such as Autocalibration® technology, make
these best-of-class products.
Berkeley's wafer-handling subsystems, BX-series machine controllers,
MachineWorks® software suite, expansion I/O systems, and wafer-handling
components simplify and ease OEM toolmaker design of robust products.
Berkeley's component-level products for semiconductor tool integration
support the rapid and robust integration of optimal semiconductor
tool solutions. At the heart of these components are the BX-series
fully integrated motion-and-machine controllers, and the MachineWorks
software suite.
|
|
|
|
|
 |
|
|
|
|
|
|
|
 |
|
BX
Motion-and-Machine Controllers
The BX controller is a networked multi-axis motion-and-machine controller
with integral servo drives, I/O, safety circuitry, process control,
and more. The BX controller family is completely configurable to provide
you with all that you need, and just what you want. |
|
|
|
|
|
|
|
|
 |
|
BXpa
Pre-Aligner
The BXpa wafer pre-aligner is the industry leader for speed and accuracy.
The BXpa can achieve wafer orientations within a +/-.04 degree of
accuracy and under one second.
|
|
|
|
|
|
 |
|
FoupServer™
FOUP Buffer
The FoupServer is a 12 FOUP buffer used for high-throughput or batch
process tools. These buffers incorporate Autocalibration technology
for ease of implementation and rapid startups.
|
|
|
|
|
|
|
 |
|
|
|
|
|
|
|
 |
|
MachineWorks®
Software
MachineWorks is an extremely powerful collection of software tools
specifically designed to simplify development and maximize the utility
of your machine control applications. |
|
|
|
|
|
 |
|
Autocalibration®
Technology
Berkeley's patented Autocalibration technology allows for total elimination
of the manual and subjective teaching of semiconductor robots. This
technology allows for varying methods of automatically calibrating
robots to their environments and pick/place locations. |
|
|
|
|
|
|
|
Semiconductor
Toolkit
The Semiconductor Toolkit provides wafer-handling software utilities
that run with Berkeley's standard motion-and-machine control products.
This product brings configurable, modular, parametric code to the
user. Autocalibration, wafer mapping, robot health checks and more
can be configured in minutes, while the toolkit configures the code.
This feature virtually eliminates the need for user programming and
brings patented features such as Autocalibration technology to the
user in an easy to configure utility toolkit. |
|
|
|
|
|
|
|
|
BX-300 Wafer Handling (PDF)
Registration Updates
Online Support
